Title

Synthesis of polycrystalline silicon thin films with 'icosahedral' symmetry by ceramics hot wire chemical vapor deposition

Abstract

We report on synthesis and materials physics of polycrystalline silicon thin films deposited on glass with rarely observed 'five-fold' symmetry or 'icosahedral' symmetry. We invented these 'novel form' of polycrystalline silicon thin films by ceramics hot wire chemical vapor deposition (hot-wire CVD). A new physical effect in hot-wire CVD technology has been proposed that controls the nucleation and growth of silicon thin films on glass substrate.

Department(s)

Physics, Astronomy, and Materials Science

Document Type

Article

DOI

https://doi.org/10.1016/j.jnoncrysol.2006.01.025

Keywords

Atomic force and scanning tunneling microscopy, Chemical vapor deposition, Crystal growth, Scanning electron microscopy, X-ray diffraction

Publication Date

6-15-2006

Journal Title

Journal of Non-Crystalline Solids

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