Title
Interfacial microchemical characterization needs in surface processing
Abstract
A number of materials and processing problems have been identified in which our microchemical characterization abilities are lacking. More than 20 areas for research are identified. Some of the highest priority projects include the development of techniques and methods with improved chemical specificity at interfaces, the development of fast, real-time surface and interface methods, the improvement of the cost and reliability of manufacturing monitors, and an increase in the collaboration among university, industry, and government laboratories.
Document Type
Article
Publication Date
12-1-1993
Recommended Citation
Gaarenstroom, Stephen W., Richard J. Anderson, Gerald C. Nelson, Ronald J. Baird, Matthew J. Zaluzec, Philip L. Coduti, and Michael Liehr. "Interfacial microchemical characterization needs in surface processing." Presented at the Workshop on Surface Processing, pp. 10-12. 1992.
Journal Title
Critical Reviews in Surface Chemistry
