Temperature sensitive ion-implanted polymer films

Abstract

The electrical resistivity of polymer films changes four or five orders of magnitude after ion implantation. The temperature coefficient of resistance, α, is very large and negative [R.E. Giedd, J. Shipman and M. Murphy, Mater. Res. Soc. Symp. Proc. 147 (1989)]. This large a suggests that these materials might make useful precision temperature transducers and we have characterized them for use in this manner. A number of polyacrylonitrile (PAN) type polymers were chosen because of their characteristic of decreasing in resistivity after pyrolysis. We found that the material most suitable for this application was PAN implanted with boron to a fluence of 1 × 1017ions/cm2 with a beam energy of 50 keV and a beam current of 300 μA. Our results indicated a stable resistivity from 60 to 400 K as well as a good surface morphology for the manufacture of small temperature sensors. © 1991.

Department(s)

Physics, Astronomy, and Materials Science
Biomedical Sciences

Document Type

Article

DOI

https://doi.org/10.1016/0168-583X(91)95805-N

Publication Date

7-1-1991

Journal Title

Nuclear Inst. and Methods in Physics Research, B

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