Direct Determination of Medium Range Ordering in Amorphous Hydrogenated Boron Carbide for Low-k Dielectric Applications
Department(s)
Physics, Astronomy, and Materials Science
Document Type
Article
DOI
https://doi.org/10.1017/s143192762001394x
Publication Date
7-1-2020
Recommended Citation
Gharacheh, Mehrdad Abbasi, Soohyun Im, Jared Johnson, Gabriel Calderon Ortiz, Menglin Zhu, Nathan Oyler, Michelle Paquette, Paul Rulis, Ridwan Sakidja, and Jinwoo Hwang. "Direct Determination of Medium Range Ordering in Amorphous Hydrogenated Boron Carbide for Low-k Dielectric Applications." Microscopy and Microanalysis 26, no. S2 (2020): 248-249.
Journal Title
Microscopy and Microanalysis
COinS
