Effect of substrate temperature on properties of multilayer thin film based on ZnO and Mo-doped indium oxide

Abstract

Zinc oxide/molybdenum-doped indium oxide/zinc oxide (ZnO/IMO/ZnO) multilayer thin films are grown using pulsed laser deposition technique. The effect of substrate temperature on structural, optical, and electrical properties of multilayer films is studied. It is observed that films grown at high substrate temperature are oriented along (0 0 2) and (2 2 2) direction for ZnO and IMO respectively. The crystallinity of these films increases with increase in substrate temperature. It is also seen that conductivity, carrier concentration, and mobility increase with increase in temperature. The multilayer film grown at 500 °C has low resistivity (7.67 × 10-5 Ω cm), high carrier concentration (3.90 × 1020 cm-3), and high mobility (209 cm2/Vs).

Department(s)

Physics, Astronomy, and Materials Science

Document Type

Article

DOI

https://doi.org/10.1016/j.apsusc.2009.09.018

Keywords

zinc oxide, indium oxide, pulsed laser deposition, transparent electrode, hall effect, multilayer

Publication Date

2009

Journal Title

Applied surface science

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