Future bio-medical devices with dimensions in the nanoscale region will need independent energy sources to power them. Lithium-ion micro- and nano-batteries are excellent candidates for these power sources. Our proposed nanobattery design ensures that these batteries remain lightweight and safe with fast rechargeable times. We have used femtosecond laser for precision machining. Intense electric fields produced by the laser beam induces electrical breakdown due to avalanche ionization. For femtosecond pulses, this breakdown threshold remains fairly deterministic thereby allowing the use of femtosecond lasers for micro- and nano-machining. The nanobattery consisted of an anode, cathode and separator. The anode was made of graphite or molybdenum oxide while the cathode was made of LiCoO . The separator was a Kapton membrane with an array of n x n holes micro- or nano-scale holes machined into it which were then filled with Li-based electrolyte. For biomedical applications these batteries must be packaged with bio compatible polymers. Initiated chemical vapor deposition is an attractive technique where polymeric films are deposited by activating a mixture of gas of monomers and initiators. This solventless technique is substrate independent and should lead to the deposition of biocompatible films that can be used to coat and package electronic devices.


Physics, Astronomy, and Materials Science

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Conference Proceeding

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This article is distributed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) license.


Biomedical applications, Femtosecond laser, ICVD, Microbatteries, Nanobatteries

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Journal Title

BIODEVICES 2013 - Proceedings of the International Conference on Biomedical Electronics and Devices