Title

Synthesis of single crystalline silicon nanowires and investigation of their electron field emission

Abstract

A systematic study of the effects of growth parameters on the morphology and field emission performance of silicon nanowires has been undertaken. Single-crystalline silicon nanowires were synthesized by chemical vapor deposition using indium tin oxide-coated glass as a substrate. Morphologies, internal structures and chemical compositions of the resulting nanowires were analyzed using scanning electron microscopy, transmission electron microscopy and energy-dispersive x-ray spectroscopy. The resulting silicon nanowires possessed a highly ordered single crystalline Si core without an external oxide layer and no obvious indium or tin impurities. For silicon nanowires with growth-times of 5, 10, and 20 mins, the turn-on fields were determined to be 7.4, 7.9, and 11.5V∕μm, while the threshold fields were 9.9, 11.8, and 16.9V∕μm, respectively. Field enhancement factors of 540, 270, and 265 were also calculated while peak emission currents in excess of 25μA were observed for nanowires with 5 min growth-times. These results strongly suggest the viability of silicon nanowires as emitters in devices where high emission currents are required.

Document Type

Article

DOI

https://doi.org/10.1116/1.2137338

Publication Date

2006

Recommended Citation

McClain, Devon, Raj Solanki, Lifeng Dong, and Jun Jiao. "Synthesis of single crystalline silicon nanowires and investigation of their electron field emission." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 24, no. 1 (2006): 20-24.

Journal Title

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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