Effects of dose rate on the electrical conductivity of ion implanted polymers

Abstract

Several kinds of polymers were implanted by 50 keV nitrogen (N+ and N+2) with different dose rates (0.16-2.03 μA/cm2). The resistivity was measured using a constant voltage method. The dose rate was found to significantly influence the resistivities of implanted polymers. The temperature of the targets at the end of the implant was more dependent upon the total fluence than the dose rate. While some variation of resistances of the conducting layer was observed for different implant dose rates, no blistering or bubble formation occurred under these conditions. The dose rate was found to also affect the current-voltage characteristic and temperature-dependent resistivity of implanted polymers. © 1991.

Department(s)

Physics, Astronomy, and Materials Science

Document Type

Article

DOI

https://doi.org/10.1016/0168-583X(91)96119-6

Publication Date

5-1-1991

Journal Title

Nuclear Inst. and Methods in Physics Research, B

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