Nanoscale Structure-Property Relationship in Amorphous Hydrogenated Boron Carbide for Low-k Dielectric Applications
Department(s)
Physics, Astronomy, and Materials Science
Document Type
Article
DOI
https://doi.org/10.1017/s1431927617008091
Publication Date
7-1-2017
Recommended Citation
Im, Soohyun, Michelle M. Paquette, Mohammed Belhadj-Larbi, Paul Rulis, Ridwan Sakidja, and Jinwoo Hwang. "Nanoscale Structure-Property Relationship in Amorphous Hydrogenated Boron Carbide for Low-k Dielectric Applications." Microscopy and Microanalysis 23, no. S1 (2017): 1486-1487.
Journal Title
Microscopy and Microanalysis
COinS
